IC695ALG626 開(kāi)料是把原始的覆銅板切割成能在生產(chǎn)線上制作的板子的過(guò)程,首先來(lái)跟EDA365電子論壇一起了解幾個(gè)概念:
(1)UNIT:UNIT是指PCB設(shè)計(jì)工程師設(shè)計(jì)的單元圖形。
(2)SET:SET是指工程師為了提高生產(chǎn)效率、方便生產(chǎn)等原因,將多個(gè)UNIT拼在一起成為的一個(gè)整體的圖形。也就是我們常說(shuō)的拼板,它包括單元圖形、工藝邊等等。
(3)PANEL:PANEL是指PCB廠家生產(chǎn)時(shí),為了提高效率、方便生產(chǎn)等原因,將多個(gè)SET拼在一起并加上工具板邊,組成的一塊板子。
2
內(nèi)層干膜(INNER DRY FILM)
內(nèi)層干膜是將內(nèi)層線路圖形轉(zhuǎn)移到PCB板上的過(guò)程。
在PCB制作中我們會(huì)提到圖形轉(zhuǎn)移這個(gè)概念,因?yàn)閷?dǎo)電圖形的制作是PCB制作的根本。所以圖形轉(zhuǎn)移過(guò)程對(duì)PCB制作來(lái)說(shuō),有非常重要的意義。
內(nèi)層干膜包括內(nèi)層貼膜、曝光顯影、內(nèi)層蝕刻等多道工序。
內(nèi)層貼膜就是在銅板表面貼上一層特殊的感光膜,就是我們所說(shuō)的干膜。這種膜遇光會(huì)固化,在板子上形成一道保護(hù)膜。曝光顯影是將貼好膜的板進(jìn)行曝光,透光的部分被固化,沒(méi)透光的部分還是干膜。然后經(jīng)過(guò)顯影,褪掉沒(méi)固化的干膜,將貼有固化保護(hù)膜的板進(jìn)行蝕刻。再經(jīng)過(guò)退膜處理,這時(shí)內(nèi)層的線路圖形就被轉(zhuǎn)移到板子上了。
其整個(gè)工藝流程如下圖。
對(duì)于設(shè)計(jì)人員來(lái)說(shuō),我們最主要考慮的是布線的最小線寬、間距的控制及布線的均勻性。
因?yàn)殚g距過(guò)小會(huì)造成夾膜,膜無(wú)法褪盡造成短路。線寬太小,膜的附著力不足,造成線路開(kāi)路。所以電路設(shè)計(jì)時(shí)的安全間距(包括線與線、線與焊盤(pán)、焊盤(pán)與焊盤(pán)、線與銅面等),都必須考慮生產(chǎn)時(shí)的安全間距。
(1)前處理:磨板
磨板的主要作用:基本前處理主要是解決表面清潔度和表面粗糙度的問(wèn)題。去除氧化,增加銅面粗糙度,便于菲林附著在銅面上。
(2)貼膜
將經(jīng)過(guò)處理的基板通過(guò)熱壓或涂覆的方式貼上干膜或濕膜 ,便于后續(xù)曝光生產(chǎn)。
(3)曝光
將底片與壓好干膜的基板對(duì)位,在曝光機(jī)上利用紫外光的照射,將底片圖形轉(zhuǎn)移到感光干膜上。
底片實(shí)物圖。
(4)顯影
利用顯影液(碳酸鈉)的弱堿性將未經(jīng)曝光的干膜/濕膜溶解沖洗掉,已曝光的部分保留。
(5)蝕刻
未經(jīng)曝光的干膜/濕膜被顯影液去除后會(huì)露出銅面,用酸性氯化銅將這部分露出的銅面溶解腐蝕掉,得到所需的線路。
IC695ALG626
AMAT P5000 WAFER LIFT PRECISION 5000 0010-09341
AMAT P5000 LIQUID SOURCE HEATER CONTROL BOARD 0100-0918
VARIAN E1000 PCB SUB ASSY. DOSE CONTROLLER 112321003
Applied Materials Process Kit 03 Teos
NIKON i-14, EX14, S203 RL-LIB 4S018-159
NIKON i-14, EX14, S202, S203, S204, SF100, 120, 200 ALG
NIKON i-14, EX14, S202 AF-IF8 4S007-785
NIKON i-14, EX14 LC-CTL3 4S014-114
NIKON i14,EX14,S202 Reticle Loader Arm 4B015-222AN
NIKON i-14, EX14, S202, S203, S204, SF100 NK-C303-40 4S
NIKON NK-C303-40 4S015-096
VARIAN E500 SCAN GEN CONTROL E11005430
Applied Materials Process Kit Nitride
NIKON i14,EX14,S202 AF Sensor Unit 4B990-525
NIKON EX14, S202 EPDRV1-XB 4S018-177
NIKON i14 WL3I04 4S018-538
NIKON i-12, EX14 WL3IO4 4S018-538
NIKON PS 4S001-086
NIKON i-14, EX14 RL-CTRL 4S014-097
NIKON R/L Mother Board 4S018-402
NIKON i14,EX14,S202 OF Rotation Motor 4S999-135
NOVELLUS C2 ALTUS RIGHT LOADLOCK INTFC PCB 03-034720-00
ASTEX ATL-100RA MATCH ATL100RA 500W, 350KHz
AMAT P5000 TURBOTRONIK NT340M/I
Applied Materials Oxide Process Kit
NIKON i14,EX14,S202 Wafer Stage Flat Cables 4S032-643AN
NIKON i-14, EX14, S202, S203, S204, SF100 C30-I/F 4S018
NIKON SHRINC-INTF-1 4S007-781-1
Applied Materials Process Kit DT ESCWC
Applied Materials Process Kit S3V UNI92
LAM 4500 PCB 810-017075-003
NIKON i14 WL3SEN2 4S018-057-4
NIKON i12, i-14, EX14, S202, S203 WL3SEN2 4S018-057
LAM 4500 Outer Gate Assy 853-012350-002
LAM 4500 Etcher Inner Gate Valve Drive 853-012200-002
LAM 4500 POWER SUPPLY,+5 +\-15VDC,PS2 660-091821-001
NIKON RL-L (Theta) 4S018-160-2-C
NIKON ALIGN A-focus Module(X3 PCB) 4S007-930 -931 -948
NIKON W/L Mother Board (WL3MTR4) 4S018-659
LAM 4500 GAP DRIVE AMP INTERLOCK BOARD 810-17013
NIKON OPD Mother Board (OPDMTH3) 4S018-171-2
NIKON EX14, S202,S203, S204, SF200 EPDRV1-X2A 4S018-444
NIKON i-12, EX14 WL3 MTR-H2 4S018-056
NIKON i14 WL3 MTR-H2 4S018-056-1
LAM 4500 ASSY DIP HIGH FREQUENCY 810-017003-004
LAM 4500 PCB HEARTBEAT 810-17012-002
AMAT XR80 CONTACTER DRIVE 0100-90385
AMAT XR80 DATA ACQUISITION INVERTER 0100-90027
NIKON i-14, EX14 PPD-EXDRV 4S007-608
NIKON i14,EX14,S202 Interferometer Recievers 4S259-024
NIKON i14,EX14,S202 Nikon CCD Camera Head (Model NVC8-2
NIKON i14, EX14 MTH-8RL 4S018-161
NIKON i-14, EX14, S202 AIRCTRL2 4S018-172
VARIAN E SERIES DRIVE,ELEVATOR,ASSY E11035771
NIKON i-14, EX14, S202 PS 4S001-062
NIKON ALG Mother Board (ALGMTH-SR8) 4S018-162
NIKON i14,EX14,S202 WL3 touch screen 4S599-812DN
NIKON i-14, EX14, S202, S203, S204, S205,4S001-060
NOVELLUS C2 ALTUS DIAGNOSTIC HUB CT-N806 CORMAN TECH.
NIKON LC Mother Board (MTHR8) 4S018-156
NIKON i-14, EX14, S203, SF100, 120, 130, 200 4S007-865
NIKON EX14 PPD-CTL/PPD-CPU 4S017-912
NIKON EX14, S202, S203 X2A-STG A/D 4S007-902
VARIAN E500 PS Control PCB D-E15002350
LAM 4500 ASSY EDGE SENSOR 853-012500-002
NIKON ALG LIUIF2 4S018-167
AMAT P5000 TEOS GAS INTERFACE BOARD 0100-09107
NIKON EX12, i-14, EX14, S202 ND-PWMBRD 4S007-684
NIKON i-14, EX14 SR8-FC2 4S007-783
NIKON i14,EX14,S202 Maxon DC Motor 4S602-208-1
LAM 4500 WELDMENT 839-011237-001
VARIAN E1000 PCB ASSY LOAD LOCK INTERFACE D-E15000710
VARIAN E1000 307 VACUUM GUAGE CONTROLLER E23000035
NIKON i14,EX14,S202 CCD Video Camera Module 4S585-114
NIKON PS 4S001-081
AMAT P5000 CHAMBER INTERCONNECT BOARD ASSY 0100-09099
AMAT P5000 TEOS INTERFACE BOARD 0100-09174
VARIAN E SERIES PCB ASSY DIGITAL IO E15000031
NIKON i14,EX14,S202 WL3 CTR Detection 4B990-540 -541
NIKON i-14, EX14, S202, S203, S204, S205, 4S001-061
NIKON i14,EX14,S202 RL Robot Z drive motor 4S602-132
NIKON PPD-EXBDY 4S007-609
NIKON L.M I/F PCB 4S018-214-1
NIKON WL3CR PCB 4S007-554-2
NIKON i14,EX14,S202 LSA Power Supply 4S599-197
NIKON LC LIUIF 4S018-168
NIKON EX14, S203, SF100, 120, 130, 200 FIAAF 4S007-667
AMAT P5000 RS232 VIDEO INTERCONNECT BOARD 0100-09145
LAM 4500 GAP MOTOR CONTROLLER BOARD 810-17018
NIKON EX14, S202, S203, SF200 EX-AIS 4S007-843
NIKON STG LIUIF 4S017-866
NIKON EX14, S202, S203, S204, SF100, 120, 4S007-787-2
NIKON X2A-STGP/H 4S007-901
NIKON EX-S/H-2 4S007-959
NIKON PS 4S001-064
LAM 4500 WAFER HANDLER 715-130080-008
LAM 4500 16 CHANNEL HEAT/COOL BOARD 810-17082
AMAT P5000 TEOS INTERLOCK BOARD 0100-09175 REV.C
NIKON i14,EX14,S202 ITV Monitor 4S599-943AN
AMAT XR80 GAP SERVO 0100-91055
LAM 4500 FORCE COMPUTERS PCB 810-017034-300
NIKON STG Mother Board (STGPWTXB/P) 4S013-332
AMAT XR80 TPDU MONITOR 0100-90492
NIKON FIA LED Unit 4B990-557
NIKON i-12, i-14, S202, S203, S204 WL3Pre2 4S007-692-1
NIKON EX14, i-14, S202 STG 81 4S007-760-1
LAM 4500 ASSY GAP DRIVE PROTECTOR 853-011168
AMAT P5000 GAS PANEL BOARD 0100-76258
AMAT P5000 PNUEMATIC CONTROL BOARD 0100-09008
NIKON i-14, EX14, S202, S203, SF100, 120, 200 4S007-789
NIKON SR8-PRE2 4S007-792
NIKON OPD-I/F 4S007-889
IC695ALG626