1747-L551 目前可靠性問題是碳化硅器件利用和市場增長的攔路虎，問題之一涉及位于功率MOSFET的電源與列車之間的PN結二極管［4］。PN結二極管的外施電壓使其帶電，造成導通電阻變化，進而有損于器件的可靠性。東芝新推出的肖特基勢壘二極管（SBD）內嵌式MOSFET器件結構正是此問題的克星。
該新結構中有一個與電池單元內的PN結二極管平行設置的肖特基勢壘二極管，可防止PN結二極管帶電。相較于PN結二極管，內嵌肖特基勢壘二極管的通態電壓更低，因此電流會通過內嵌肖特基勢壘二極管，進而抑制導通電阻變化和MOSFET可靠性下降等問題。
內嵌肖特基勢壘二極管的MOSFET現已投入實際應用，但僅限于3.3kV器件等高壓產品；內嵌肖特基勢壘二極管通常會使導通電阻升高至僅高壓產品能承受的一個電壓水平。東芝在調整各個器件參數后發現MOSFET中肖特基勢壘二極管的面積比是抑制導通電阻增大的關鍵因素。東芝通過優化肖特基勢壘二極管的這一比例，實現了1.2kV級高可靠型碳化硅（SiC）MOSFET。
東芝計劃自今年八月下旬起利用這項新技術開始量產1.2kV級碳化硅（SiC）MOSFET。
2020年7月德國紐倫堡國際電力電子系統及元器件展覽會（PCIM Europe）上報道了該新器件結構的詳情，這是一次在線舉辦的國際性功率半導體展會。
注
［1］ MOSFET：金屬氧化物半導體場效應晶體管
［2］ 肖特基勢壘二極管（SBD）：通過半導體與金屬接合形成的一種半導體二極管
［3］ 東芝規定當以250A/cm2的電流密度通過電源向某器件的漏極通電1，000小時后才出現導通電阻變化，即視為該器件可靠。東芝的典型MOSFET的導通電阻變化率高達43%，而肖特基勢壘二極管（SBD）內嵌式MOSFET的這一變化率僅為3%。
［4］ PN結二極管：通過在電源與漏極之間設置PN結形成的一種二極管
肖特基勢壘二極管（SBD）內嵌式MOSFET的結構
肖特基勢壘二極管（SBD）內嵌式MOSFET可抑制導通電阻變化
1747-L551
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