1762-L24AWA
來(lái)，領(lǐng)先的IC供應(yīng)商將遷移到諸如納米片之類(lèi)的GAA架構(gòu)，這將面臨諸多挑戰(zhàn)。
“就像從平面到FinFET的過(guò)渡一樣，從FinFET到GAA的過(guò)渡也將是艱難的。”LamResearch計(jì)算產(chǎn)品副總裁DavidFried說(shuō)。“轉(zhuǎn)向FinFET時(shí)，的挑戰(zhàn)是優(yōu)化垂直側(cè)壁上的器件，因此出現(xiàn)了許多表面處理和沉積挑戰(zhàn)。現(xiàn)在，使用GAA必須在結(jié)構(gòu)底層優(yōu)化設(shè)備。表面處理和沉?xí)兊酶咛魬?zhàn)性。”
蝕刻，一種去除晶體管結(jié)構(gòu)中材料的工藝，如今也更具有挑戰(zhàn)性。Fried說(shuō)：“使用平面結(jié)構(gòu)時(shí)，通常很清楚何時(shí)需要各向同性（共形）的過(guò)程而不是各向異性（定向）的過(guò)程。使用FinFET時(shí)變得有些棘手。使用GAA時(shí)，這個(gè)問(wèn)題變得非常棘手。一些過(guò)程在某些地方需要各向同性，例如在納米線(xiàn)/片材下方進(jìn)行蝕刻以及各向異性，這個(gè)過(guò)程挑戰(zhàn)。”
圖2：堆疊納米片F(xiàn)ET的工藝流程。
在工藝流程中，納米片F(xiàn)ET開(kāi)始于在基板上形成超晶格結(jié)構(gòu)。外延工具在襯底上沉積交替的SiGe和硅層。至少堆疊三層SiGe和三層硅組成。
下一步是在超晶格結(jié)構(gòu)中制造微小的垂直鰭片。每個(gè)納米片彼此分開(kāi)，并且在它們之間留有空間。在晶圓廠(chǎng)流程中，使用極紫外（EUV）光刻技術(shù)對(duì)鰭片進(jìn)行構(gòu)圖，然后進(jìn)行蝕刻工藝。
OntoInnovation戰(zhàn)略產(chǎn)品營(yíng)銷(xiāo)總監(jiān)ScottHoover表示：“GAA晶體管的性能僅好于其最弱的溝道，因此需要單獨(dú)的納米片尺寸控制度量。通過(guò)超晶格形成鰭需要對(duì)厚度，成分和硅片CD進(jìn)行單獨(dú)的層控制。”
然后是更困難的步驟之一——內(nèi)部間隔物的形成。首先，使用橫向蝕刻工藝使超晶格結(jié)構(gòu)中的SiGe層的外部凹陷。這樣會(huì)產(chǎn)生小空間，并充滿(mǎn)電介質(zhì)材料。
TEL的技術(shù)人員羅伯特·克拉克（RobertClark）表示：“由于不能停止蝕刻，控制內(nèi)部間隔物凹槽蝕刻的工藝變化非常困難。理想情況下，只想在金屬的外延層穿過(guò)側(cè)壁間隔物的地方凹進(jìn)去，然后用電介質(zhì)內(nèi)部間隔層替換該外延層。這是非常關(guān)鍵的5nm凹陷蝕刻，因?yàn)檫@是非線(xiàn)性且無(wú)法停止，難度相當(dāng)于無(wú)網(wǎng)走鋼絲的過(guò)程。”
還有其他挑戰(zhàn)。“內(nèi)部間隔模塊對(duì)于定義最終晶體管功能至關(guān)重要，對(duì)該模塊的控制對(duì)于程度地減少晶體管可變性至關(guān)重要。內(nèi)部隔離模塊可控制有效柵極長(zhǎng)度，并將柵極與源極/漏極epi隔離開(kāi)。”KLA工藝控制解決方案總監(jiān)AndrewCross說(shuō)道，“在該模塊中，SiGe會(huì)凹進(jìn)去，然后內(nèi)部隔離層會(huì)沉積并凹陷。在內(nèi)部隔離物形成的每個(gè)步驟中，精確控制凹口和最終隔離物凹槽的形狀和CD對(duì)確保晶體管性能至關(guān)重要。而且，需要控制堆棧中每個(gè)單獨(dú)的溝道。”
接下來(lái)，形成源極/漏極，然后是溝道。這需要使用蝕刻工藝去除超晶格結(jié)構(gòu)中的SiGe層，剩下的是構(gòu)成溝道的硅基層或片。
“此步驟是GAA結(jié)構(gòu)彼此分離，這可能導(dǎo)致具有挑戰(zhàn)性的缺陷，例如納米片之間的殘留物，納米片的損壞或與納米片本身相鄰的源/漏極的選擇性損壞。”Cross說(shuō)。
挑戰(zhàn)不止如此。Onto‘sHoover說(shuō)：“形成溝道需要對(duì)板高、拐角腐蝕和溝道彎曲進(jìn)行單獨(dú)控制。”
高k/金屬柵材料沉積在結(jié)構(gòu)中，最后形成銅互連，從而形成納米片F(xiàn)ET。“其他可能改變的模塊是設(shè)備的底部隔離和用于容納納米片的功能性金屬/層，但是這些模塊主要依賴(lài)于行業(yè)中已知/開(kāi)發(fā)的工藝。
當(dāng)然，即便不是全新的模塊，實(shí)現(xiàn)也變得越來(lái)越困難。
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1762-L24AWA 1
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