MURR 85301 55467-1.04
構建好硅納米片的溝道區域后,就需要填充間隙,首先用電介質,然后用金屬環繞溝道,以形成柵極疊層。這兩個步驟都是通過稱為“原子層沉積”的工藝完成的,這種工藝僅在十年前才引入半導體制造領域。
納米片設計的之處是,它可能延續摩爾定律的有效壽命,甚至超過溝道中硅的使用時間,但是首先要解決散熱問題。每代工藝節點的晶體管密度仍在不斷增加,但芯片可以合理散熱的功率密度近十年來一直保持在每平方厘米100瓦左右。
芯片制造商已竭盡全力避免超過這一上線。為了降低熱量,時鐘速率不得超過4 GHz,于是處理器廠商轉向多核設計,期望幾個較慢的處理器內核可以完成與單個快速處理器內核相同的工作,同時產生的熱量更少。然而,如果想再次提高時鐘速度,我們就需要比硅本身的能效更高的晶體管。
一種潛在的解決方案是將新材料引入溝道區域,例如鍺或由元素周期表的第III列和第V列的元素組成的半導體,例如砷化鎵。電子在其中一些半導體中的移動速度可以快10倍以上,從而使得由這些材料制成的晶體管的開關速度更快。更重要的是,由于電子運動更快,器件可以在較低的電壓下工作,從而提高了能效,并減少了熱量的產生。
受早期關于納米線晶體管和超晶格結構研究的啟發,普渡大學的Peide Ye教授使用砷化銦鎵(III-V半導體)研制出一種三納米片器件,其結果好于預期。這種納米片晶體管對于每微米的溝道寬度允許9,000微安的電流。這是當今的平面型InGaAs MOSFET的三倍左右。如果制造工藝得到進一步改善,這種器件的性能仍然可以提高。通過堆疊更多的納米片,我們有可能將性能提高10倍以上。因此,這一設計思路對未來的高速和節能型集成電路的發展有著重要的指導意義。
當然,InGaAs并不是未來納米片晶體管的唯一選擇。研究人員還在探索其他具有高遷移率載流子的半導體,包括鍺、砷化銦和銻化鎵。例如,新加坡國立大學的研究人員最近使用由砷化銦制成的N型晶體管和由銻化鎵制成的P型晶體管的組合,構建了完整的CMOS IC。然而,一種可能更簡單的解決方案是使用摻雜的鍺,因為電子和正電荷載流子(空穴)通過鍺的速度都非常快。
總而言之,無論采用什么化合物材料,堆疊納米片似乎是構造未來晶體管的方法。芯片制造商已經對該技術有足夠的信心,相信在不久的將來會將其納入設計規劃路線圖。隨著高遷移率半導體材料的集成,納米片晶體管將滲透到我們的未來生活,這是任何人現在就可以預見到的。
MURR 85301 55467-1.04
Edwards GVI 100P
30 gallon Flammable Cabinet PWT-SMT-C10
Lyon Metal Productions 5445 45 Gallon Storage Cabinet
Parker Valve 3/4” Check CV-1-661212
ASML/SVG A1300 Power I/O 865-8025-001-02
CSA Wireless Tilt Mount for 65 and 85 PCSX Antennas XSL
MKS Type 652 Exhaust Throttle Valve Controller 652B
Dwyer Minihelic Pressure Indicating Transmitter 604D-0
New Tescom Industrial Controls 44-1121-24 303 Stainless
ASML 4022.435.24391 Lithography Vacuum Output Sensor
ASML 4022.502.26008 New Shutter Blade Assy SVG
ASML 4022.436.7961 SVG 12NC.15.11.00
ASML 4022.436.7960 Z436A CMG SVG Switch Assy.
ASML 8122.389.1501.3 Focus Module
ASML 4022.436.6768 SVG
ASML 4022.438.42615 14 Halogen lamps 12v/100W SVG
NEC-16 T board
2094-ANCON-1
2094-ANINV-2
2094-BC01-M01
2094-BC01-M01-M
2094-BC01-M01-S
2094-BC01-MP5
2094-BC01-MP5-M
2094-BC01-MP5-S
2094-BC02-M02
2094-BC02-M02-M
2094-BC02-M02-S
2094-BC04-M03
2094-BC04-M03-S
2094-BC07-M05
2094-BC07-M05-S
2094-BL02
2094-BL10S
2094-BL25S
2094-BL50S
2094-BL75S
2094-BM01
2094-BM01-M
2094-BM01-S
2094-BM02
2094-BM02-M
2094-BM02-S
2094-BM03
2094-BM03-S
2094-BM05
2094-BM05-S
2094-BMP5
2094-BMP5-M
2094-BMP5-S
2094-BNCON-1
2094-BNINV-2
2094-BSP2
2094-PR1
2094-PR2
2094-PR4
2094-PR6
2094-PR8
2094-PRF
2094-PRS1
2094-PRS2
2094-PRS3
2094-PRS4
2094-PRS5
2094-PRS6
2094-PRS7
2094-PRS8
2094-SE02F-M00-S1
2094-XL75S-C1
2094-XL75S-C2
2094-XNBRKT-1
2094-XNCON-2
2094-XNINV-1
2094-XNLIM-2
2094-XNSHT-1
Intel Top Assy 165151-005
NEC-16 board
Intel Assy 4002695-04 PWA 1002494-007R
ASML 4022.471.8361 S31 Module Card SVG
ASML 4022.471.7409 Module Card ID W2R/WSE 4 SVG
ASML 4022.480.62691 Lithography Vacuum Output Sensor
ASML 4022.471.5043 Module Card SVG
ASML 4022.430.1445 Module Board SVG
ASML 4022.437.1808 LEV. Control Board SVG
ASML 4022.430.0478 Shutter Control board SVG
ASML 4022.471.7407 Module Card ID WC1R/WSM 3 SVG
Jennings UCS-300-15S Vacuum Capacitor CVDD-300-15S
Mega Lightning PCI PC-602167-R3 Color Graphic
RomMax Rev 1.5 E.E. Tools Inc 069717
Applied Materials Water cooled RF Coil (2) AMAT
SVG 851-859-0980-005 G A1207
ASML 4022.471.8998 Card SVG
SVG 851-8226-008 C A1212 4 Axis Counter
SVG 851-8226-008 A A1212 4 Axis Counter
MKS Instruments HPS Division 100991588
ASML 4022.437.1822 Master Board SVG
NEW SVG 851-859-0980-005 B A1207
Pepper Fuchs Visolux Sensor MLV20-8-H-2376 419365
ASML 4022.455.55151 Carbon Filter
ASML 4022.451.87731 Retour Hakapak Sensor
ASML 4022.437.06371 Video Adapter 13W3M to HD15F SVG
Lithography Systems Inc. 859 0331 002
ASML 4022.454.18061 Camera Positioning plate SVG
SVG 8590843003 P/C Cable Assy. NEMA Choice Logistics
ASML/SVG 851-6307-0025/N007 Optical Item
TEL Tokyo Electron RF AC/DC Peak Voltage WZ81-000643-11
TEL Tokyo Electron 22-10327-501 500W 13.56 MHZ
TEL Tokyo Electron Arizona WZ87-001334-31 CA Assy
Dwyer Photohelic A3002C
View Engineering Inc. DCO/MCU ISE Electronics 2860240
Edwards Signaling Pipe mount Stacklight 113FP-RGA-N5
Kahnetics Dispensing Systems KDS 834A
ASML 4022.436.6767 Maxon DC Motor 000301 SVG
ASML 4022.436.6808 Maxon DC Motor 014301 SVG
ASML 4022.436.6810 Maxon DC Motor 014601 SVG
ASML 4022.456.1041 Maxon DC Motor SVG 43.025.000-22.0?0
Quad Tel Corp. FER801 92-005487-00
ASML 4022.456.1040 Maxon DC Motor 030305 SVG
ASML 4022.456.1039 Maxon DC Motor 110406 SVG
Imaging Technology Inc. 18013-000 with mm-100 attached
SVG Current Driver Board 851-8877-004 ASML
Apple Computer Inc. 820-1365-A
Tokyo Electron 65-0090-012 Converter, DC to DC, +/-15 V
Intel Pro 100 Intelligent server adapter 687231-005
Ryan Herco 2422.092 PVC Hex bolt -13 x 1” 330 pieces
New CHI HUA Fitness Co. MBO-302442A-C Treadmill Motor
UPC-8130 Unit Instruments Mass Flow Controller 02 5 SLM
Dynareg LR16CT111 A
General Scanning Inc. DSP/Combiner Board 2860070-517
ASML 4022.435.3540 SVG
Toshiba Ceramics Co. Clear Carbon 35886 ASM
Tokyo Electron CVD/Etch Reactor Interface 2 Analogic
Tokyo Electron WZ81-000694-1 PCM Valve Drive
ASML 4022.480.3738 Proximity Sensor SVG
National Instruments AT-DIO-32F / AT-DIO-32HS
ASML 4022.470.0121.5 Baumer Electric CH-8501
Tokyo Electron CVD/Etch Reactor Interface 2 Analogic
Tokyo Electron CVD/Etch Reactor Interface 1 Analogic
Tokyo Electron CVD/Etch Gas Panel Interface Analogic
MKS Signal Conditioner Type 221 221BA-00010A
Parker Fluid Control Division B2DA1052
SVG/ASML 4022.454.6602.2
Ascend Communications INC. TNT-SL-HA192 0800-0412-002
Ascend Communications INC. TNT-SL-HDLC2 0800-0465-001
MKS Signal Conditioner Type 121 121AA-05000C
ASML 4022.431.27751 Baumer Electric Fiber Optic Sensor
ASML 4022.436.20262 Baumer Electric Fiber Optic Sensor
CT 170P001685 Liner P.S. Comp Side
ASML 4022.430.1213 POS BUS CON Module Board SVG
ASML 4022.428.1449 RET. HDL. Card Module Board SVG
Adept Technology 30332-22350/103?32-22000 SIO/IDE
ASML 4022.430.1235 Laser Control Module Board SVG
Lot of 214 Varian Semiconductor items
ASML 4022.430.1225 T Measurment Module Board SVG
ASML 4022.430.0672 SH. ENC. Line Module Board SVG
ASML 4022.430.0494 Module Board SVG
Tokyo Electron 3208-000095-13 PCB PST OPT
ASML 4022.430.0145 Module Board SVG
ASML 4022.430.1247 Power Amp. CT Module Board SVG
SVG/ASML 859-8209-001 CRI Assy
Global-Wulfsber?g System GNS-500A Loop Coupler Unit
ASML 4022.630.39121 RS XT3 Z-Diff Sensor Assy
Pro Mate II AC164013 Module SKT Promate II PIC16CXX 44
Pro Mate II AC144001 Module SKT Promate II PIC140XX 20
Program Motion Controller BM23995RA PCB,CAR,100,FPM
Precision Robot BM302960001 PCB, Motor, HT
PB24482 PCB, Servo, EXP Box/CAS 233221102
E.H.T Beam Current Board 851320/B/7/7
Pro Mate II AC174001 Module SKT Promate II PIC17CXX 40
UFC-1100 Unit Instruments Mass Flow Controller N2
UFC-1100 Unit Instruments Mass Flow Controller N2O
UFC-1100 Unit Instruments Mass Flow Controller NF3 2SLM
UFC-1100A Unit Instruments Mass Flow Controller N2O HP
UFC-1100A Unit Instruments Mass Flow Controller NH3 HP
Edwards INT PV25PKA B Right Angle Isolation Valve
Fairchild Z19861-30232 Model 30 Pneumatic Pressure Reg.
Lot of 17 VG Semicon LTD ORV361 O’ Ring Viton 361-19457
Whitey DOT-3E 1800 Cylinder
Pro Mate II AC164028 Module SKT Promate II PIC16C770
Pro Mate II AC174008 Module SKT Promate II PIC17C75X 64