易福門 e40240
為了阻止不必要的電荷流，必須將溝道區域做得更薄，以限制電荷流動的路徑，而且柵極需要在更多側面包圍溝道。為解決這一問題，加州大學伯克利分校的胡正明教授于2000年提出了鰭式場效晶體管（FinFET）方案。
在這種設計中，溝道區域在其側面向上傾斜，從而在源極和漏極之間形成一個細長的硅鰭，為電流提供了更寬的路徑。然后將柵極和電介質覆蓋在鰭片的三個側面，將硅鰭包圍起來。2011年，英特爾開始利用FinFET結構生產22納米的芯片。這一創新的晶體管結構把摩爾定律的有效期延長了數十年，如今22納米以下的工藝都是采用FinFET結構。
從Planar FET到FinFET再到疊層納米片FET的演進（來源：IEEE SPECTRUM）
FinFET無疑取得了巨大的成功，自2011年以來它一直是摩爾定律最后階段中先進數字邏輯芯片的主動力。英特爾、三星和臺積電等公司都在繼續使用FinFET研發7nm和5nm的芯片。但是，到了3nm節點，FinFET有點力不從心了。
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易福門 e40240
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