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IPS.DIO-1C | Man Roland | (16.86926-0067) 本設計采用以AT91SAM7S256為核心的處理器模塊。AT91SAM7S256是Atmel 公司32位ARM RISC處理器Ar91SAM7S系列中的一員。它片內集成了256KB的Flash和64 KB的SRAM，充足的存儲空間可以保證數據采集和傳送協議的正常運行，方便程序的設計與實現；豐富的外設包括串口、SPI、I2C和USB等；工作溫度范圍為-40～+85℃；具有中斷喚醒功能，可以通過中斷使單片機從休眠模式轉為活動模式。

因此，AT91SAM7S256完全能夠滿足無線傳感器網絡的設計要求。處理器模塊框圖如圖3所示。

無線射頻模塊

本設計中無線射頻模塊選用Chipcon公司生產的無線射頻芯片CC1100來實現。 CC1100是一款真正的低成本、低功耗、單片的UHF無線收發器；工作電壓為1．8～3．6 V；工作頻段靈活，可以設定在315／433／868／915 MHz的ISM和RSD頻段，其數據傳輸率可達500 kb／s；輸出功率多級可調，可以選擇多種調試方式。此外，CC1100還具有許多其他功能：數據的自動組包與拆包、獨立的發送／接收FIFO、空閑信道評估功能、自動喚醒功能、RSSI功能、自動的前向糾錯（FEC）、交織以及白化功能。CC1100與AT91SAM7S256的通信是通過SPI總線來實現的。

IPS.DIO-1C | Man Roland | (16.86926-0067) IC697MDL250     IC697MDL251     IC697MDL252
IC697MDL253     IC697MDL254     IC697MDL340
IC697MDL341     IC697MDL350     IC697MDL640
IC697MDL651     IC697MDL652     IC697MDL653
IC697MDL654     IC697MDL671     IC697MDL740
IC697MDL750     IC697MDL752     IC697MDL753
IC697MDL940     IC697MEM713     IC697MEM715
IC697MEM717     IC697MEM719     IC697MEM731
IC697MEM732     IC697MEM733     IC697MEM735
IC697MLX000     IC697MSC800     IC697MSC801
IC697MSC802     IC697PCM711     IC697PWR710
IC697PWR711     IC697PWR720     IC697PWR724 
IC697PWR748     IC697RCM711     IC698ACC701     IC698ACC720
IC698ACC735     IC698CHS009     IC698CHS017
IC698CHS109     IC698CHS117     IC698CHS217

IPS.DIO-1C | Man Roland | (16.86926-0067)
1 Brooks Flow Controller 5850EC3DH4WB2A Gas SiH4

Celerity Unit UFC-8165 30 cc SCCM SiH4 Flow Controller

 Unit Instruments UFC-1020 SiH4 Mass Flow Controller

Mott Flow Restrictor, 60 SCCM SIH4, 5009653H10RA

 Unit Instruments UFC-1020 30%B2H6/SIH4 Mass Flow 

 Tylan FC-550 SIH4 Mass Flow Controller

 Unit Instruments UFC-1020 SiH4 Mass Flow Controller

 Unit Instruments UFC-1000 SiH4 Mass Flow Controller

Nu Unit Instruments UFC-1200A SiH4 Mass Flow Controller

Nu Unit Instruments UFC-1200A SiH4 Mass Flow Controller

MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLMP 

Aera MFC FC-7800CD, SiH4 200 SCCM looks very clean

STEC SEC-4400M MFC, SiH4, 100 SCCM, AMAT # 3030-04798

DeviceNet Unit MFC UFC-8565, H2 2L, SIH4 30CC lots of 2

MILLIPORE IntelliFlow, N2 and SIH4 Used lots of 2

Precision Flow Devices 501 MFC 500 SCCM SIH4

Aera FC-7800CD, SiH4, lots of 3, used

1 Brooks Flow Controller 5850E Gas SiH4

Unit MFC 8165, 30 SCCM SiH4 MFC, 

SAM Fantas SFC480F3PD MFC Mass Flow Controller SiH4

STEC MFC SEC-7330 SiH4 5sccm Mass Flow Controller 

Unit UFC-8165 Mass Flow Controller SiH4 200sccm rebuilt

Kinetics UFC-8165 200cc SiH4 Opt:AS

 STEC MASS FLOW CONTR. SEC-7330-RC-297 SIH4 500 SCCM

Aera 10Ra FC-D980C 30 SCCM SIH4

UNIT UFC-1000 100 SCCM GAS SIH4 MASS FLOW CONTROLLER 

Aera 10Ra FC-D980C 20 sccm SIH4

MFC STEC SEC-4400MC N2, SiH4, SiF4, HCl used lots of 5

UNIT UFC-8165 200CC SiH4 Flow Controller Refurb Spare

UNIT MASS FLOW CONTROLLER 300SCCM GAS-SiH4 PN#1200A-102

 Aera FC-D980C Mass Flow Controller 500 SCCM SIH4

UNIT UFC-1000 MASS FLOW CONTROLLER HE SIH4 MFC

UNIT UFC-1200A 500 SCCM SIH4 MASS FLOW CONTROLLER 

MILLIPORE 2960 .15SLPM 5% SiH4 95% N2 MASS FLOW CONTROL

STEC MASS FLOW CONTROL SEC-4400M SiH4 200CCM
STEC MASS FLOW CONTROL SEC-4400M SiH4 200CCM

Enlarge
UNIT UFC-1500A MASS FLOW CONTROLLER GAS SIH4 300 SCCM

Mass Flow Controller, PFD, SiH4, 300 SCCM

Mass Flow Controller, PFD, SiH4, 300 SCCM

STEC MASS FLOW CONTROLLER SEC-4400M SiH4 500SCCM

STEC Mass Flow Controller SEC Z11DWM , 500 SCCM , SiH4 

UFC-1100A 200 SCCM SiH4 Silane MFC Mass Flow Controller

NOVELLUS 15-305045-00 CLAMP SIH4 DIV TUBE ASSY C2ALT

NOVELLUS 15-305046-00 CLAMP, SIH4 DIV TUBE ASSY C2ALT

UFC-1500A Unit Instruments Mass Flow Controller SiH4

NOVELLUS 10-301152-00 SIH4 DIVERT TO PED VAC TUBE ASSY

Aera 10Ra FC-D980C 100 SCCM SIH4

UFC-1500A Unit Instruments Mass Flow Cont. 5%PH3/SIH4

UFC-1500A Unit Instruments Mass Flow Controller SiH4

TYLAN FC-780 50 SCCM SIH4 MASS FLOW CONTROLLER REF 

Aera 5Ra FC-D980C 100SCCM SIH4



UFC-1100 Unit Instruments Mass Flow Controller SIH4

UFC-1100 Unit Instruments Mass Flow Cont. 5%ASH3/SIH4

UFC-1500A Unit Instruments Mass Flow Cont. 22%PH3/SiH4

UFC-1100 Unit Instruments Mass Flow Controller SiH4 HP

UFC-1660 Unit Instruments Mass Flow Controller SiH4

AERA FC-780 500SCCM GAS SIH4