MILLIPORE品牌FC-2900M庫存MYKROLIS進口氣體質量流量計控制器促銷
Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design.?? Excellent Performance Tylan FC260 qnd FM360 mass flow controllers and flowmeters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections.
Low cost mass flow controllers with long-term repeatability and performance
Tylan FC260/FM360 Mass Flow Controllers and Flowmeters ?
FC-260/FM-360
Fittings H H1 W W1 W2 L L1 L2 L3 L4 L5 S 2S in mm
5.38 136.7
4.00 101.6
1.00 25.4
0.72 18.3
0.14 3.56
3.00 76.2
3.82 97.0
4.38 111.3
4.94 125.5
2.72 69.1
0.14 3.56
0.50 12.7
4S in mm
3.82 97.0
4.44 112.7
5.03 127.8
4VCO in mm
4.55 115.6
4V in mm
4.88 123.9
FC-261/FM-361 Fittings H H1 W W1 W2 L L1 L2 L3 L4 L5 S 4S in mm
5.63 143.0
4.25 108.0
1.25 31.8
0.97 24.6
0.14 3.56
4.25 108.0
5.16 131.0
5.78 146.8
6.36 161.5
3.55 90.1
0.35 8.9
0.575 14.6
4V in mm
6.19 157.2
4VCO in mm
5.86 148.8
6S in mm
5.17 131.3
5.90 149.8
6.48 164.5
6V in mm
6.50 165.1
FC-262/FM-362 Fittings H H1 W W1 W2 L L1 L2 L3 L4 L5 S 4V in mm
7.13 181.1
5.75 146.1
1.50 38.1
1.00 25.4
0.25 6.35
5.255 133.5
6.25 158.8
6.87 174.6
7.45 189.3
4.00 101.6
0.62 15.75
0.585 14.8
6S in mm
6.27 159.3
7.57 192.3
7.59 192.7
6V in mm
6VCO in mm
7.10 180.2
2S = 1/8-inch Swagelok? 6S = 3/8-inch Swagelok 4S = 1/4-inch Swagelok 6V = 3/8-inch VCR 4V = 1/4-inch VCR? 6VCO = 3/8-inch VCO 4VCO = 1/4-inch VCO?
Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information
2
H1
W
H
S
L L1
L3 L2 (face of fittings)
L4
L5
W1
W2
0.164”-32 UNC-2B 0.25” DEEP, 2 PLACES
FRONT VIEW SIDE VIEW
BOTTOM VIEW
150? PSIG? MAX
3
Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information
Performance Gases Any gas with a known conversion factor Step Response Time 6 seconds (dependent on step request and conditions) Accuracy ± 1 of full scale ± 2 of full scale for the FC262 Linearity 0.5 of full scale Repeatability ± 0.2 of full scale Attitude Sensitivity Not sensitive Control Range 50:1 (100 - 2) FC262 50:2 (100 - 4) Mechanical Materials Type 316 Stainless Steel, Viton?, Kalrez?, or Neoprene Seals depending on gas application Leak Integrity 1 x 10-9 atm cc/sec He Electrical Analog Output 0 - 5 VDC (5 volts = full scale)
Input Power
Flow Controllers: 15 VDC ± 4, 25 mA max - 15 VDC ± 4, 180 mA max Flow Meters: 15 VDC ± 4, 25 mA max - 15 VDC ± 4, 25 mA max
Power Consumption
Flow Controllers: 4.0 watts maximum Flow Meters: 1.5 watts maximum
Command Signal
Flow Controllers: 0 - 5 VDC (2.5 k ohms max source impedance) 40-20 mA optional (contact Mykrolis)
Minimum Load Resistance 2000 ohms Environmental Temperature Range 5 - 43° C (40 - 110° F) Temperature Coefficient ± 0.1/° C Pressure Coefficient ± 0.007/psi Note: In accordance with SEMI Standard E12-91, Standard Temperature is 0° C and Standard Pressure is 760 mm Hg (14.7 psia).
Model
Ordering Information
Flow Controllers FC260 FC261 FC262 Flow Meters FM360 FM361 FM362
Fitting 2S = 1/8” Swagelok 4S = 1/4” Swagelok 4VC0 = 1/4” VCO 4V = 1/4” VCR 6S = 3/8” Swagelok 6VC0 = 3/8” VCO 6V = 3/8” VCR
Full Scale Flow* Gas
Flow Controllers Flow Meters Model FC260 FC261 FC262 FC360 FC361 FC362 Full Scale Range 10 sccm - 5 slm 6 - 20 slm 30 - 200 slm 10 sccm - 5 slm 6 - 20 slm 30 - 200 slm Pressure Drop 10 - 40 psid 15 - 40 psid 20 - 40 psid 0.5 psid at full scale flow
Gas Pressure 30 psig optimum 150 psid max
40 psig optimum 150 psid max
500 psid max
Gas Fittings 1/8” or 1/4” 1/4” 1/4” or 3/8” 1/8” or 1/4” 1/4” 1/4” or 3/8” Weight 500 gm (1.1 lb) 954 gm (2.1 lb) 2.77 kg (5.0 lb) 454 gm (1.0 lb) 907 gm (2.0 lb) 2.15 kg (4.75 lb
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店主:鄒積坤
電話:13050393336
或0415-6132608
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